SEM dashboards

Overviews

Fleet overview

The main overview which compares several key metrics across all active instruments for the last 30 days

• Beam Time: pie chart based on instrument utilization (ion beam, electron beam, iFLM, vacuum actions, cryo cycle or offline)

• Ion source lifetime: source age and last replacement date

• Last Cryo Cycle for autoloader/quickloader and column

• Total GIS usage since counter start, in hours

• Specimen Throughput: the number of cartridges and cassettes loaded daily (Arctis only)

Productivity

This view shows per-instrument counters and time series:

• autoloader cartridges/cassettes (Arctis only)

• beam time over time

• PFIB gas type usage (Arctis only) over time

• GIS usage over time

Alerts

This dashboard provides instrument summary and recent alerts for each microscope module

Modules

Apertures

This view display overall summary of FIB/SEM aperture strips and detailed utilization for each aperture index

Autoloader

Pressure, axes movements, temperatures, and LN levels are continuously monitored. This view helps you:

• Estimate the baseline pressure of the autoloader

• Verify the reproducibility of axes movements

• Track autoloader components temperatures

• Track LN dewar refilling frequency

• Display average autoloader cryo cycle duration and number of cassette loads since

• Monitor temperature recovery of the CRT and docker after cassette loading

Column

This view displays:

• HVG pressure for chamber vacuum

• Column cryo cycle frequency and duration

• GIS usage summary

• PVP lifetime and states

• Chamber interlocks

• Buffer cycle statistics

For Aquilos systems, we track extra parameters:

• Quickloader pressure

• stage and shield temperatures

• chamber state/modes

• holder types

Detectors

This dashboard monitors:

• Overall status for each detectors

• Sensor temperature for each detector

FLM

Arctis only dashboard which shows:

• filter type used: reflection or fluorescence

• LED type used: UV, Green/yellow or red

• Objective lens errors

• Overall status of area scan camera and filter exchanger

Motion

Tracks motion errors and reproducibility of axes movements for all stage axes and FIB/SEM apertures

PC Health

Show xT server status and typical PC stats: CPU, memory load etc.

Source

Various parameters for FEG and ion gun are being monitored:

• FEG operate time and states

• IGP pressures

• FEG emission current

• Ion gun IGP pressures and spikes

• LMIS/PFIB source age, last replacement date, heat cycles / ignition counts

• LMIS emission current

• PFIB gas usage, jacket flow and ignition ratio

Data browser

Mostly used for visualizing raw data from the database